<?xml version='1.0' encoding='UTF-8'?><metadata xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dcterms="http://purl.org/dc/terms/" xmlns="http://dublincore.org/documents/dcmi-terms/"><dcterms:title>Complex Refractive Index of Hafnium Zirconium Oxide (Hf1-xZrxO2, 0≤x≤1)</dcterms:title><dcterms:identifier>https://doi.org/10.18130/V3/KGK8MW</dcterms:identifier><dcterms:creator>Ihlefeld, Jon</dcterms:creator><dcterms:creator>Luk, Ting S.</dcterms:creator><dcterms:creator>Smith, Sean W.</dcterms:creator><dcterms:creator>Fields, Shelby S.</dcterms:creator><dcterms:creator>Jaszewski, Samantha T.</dcterms:creator><dcterms:creator>Constantin, Costel</dcterms:creator><dcterms:creator>Hirt, Daniel M.</dcterms:creator><dcterms:creator>Riffe, Will T.</dcterms:creator><dcterms:creator>Bender, Scott</dcterms:creator><dcterms:creator>Ayyasamy, Mukil V.</dcterms:creator><dcterms:creator>Balachandran, Prasanna V.</dcterms:creator><dcterms:creator>Lu, Ping</dcterms:creator><dcterms:creator>Henry, Michael David</dcterms:creator><dcterms:creator>Davids, Paul S.</dcterms:creator><dcterms:publisher>University of Virginia Dataverse</dcterms:publisher><dcterms:issued>2020-07-10</dcterms:issued><dcterms:modified>2020-07-10T08:21:45Z</dcterms:modified><dcterms:description>This dataset contains the complex refractive index calculated from spectroscopic ellipsometry data collected on 20 nm thick hafnium zirconium oxide films subjected to a 600 degree Celsius rapid thermal anneal that are reported in "Compositional dependence of linear and nonlinear optical response in crystalline hafnium zirconium oxide thin films," Journal of Applied Physics, (2020) https://doi.org/10.1063/5.0012175.</dcterms:description><dcterms:subject>Engineering</dcterms:subject><dcterms:subject>Physics</dcterms:subject><dcterms:date>2020-04-21</dcterms:date><dcterms:contributor>Ihlefeld, Jon</dcterms:contributor><dcterms:dateSubmitted>2020-04-21</dcterms:dateSubmitted><dcterms:license>CC0 1.0</dcterms:license></metadata>